TG390ML

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Osaka Vacuum product page · retrieved 2026-10-03

As published	N₂; rate	N₂ (with protective screen); rate	Ｈ₂; rate	Value	as printed: "Weight (kg)"	as printed: "Base pressure (ISO-B・VG)"; 7.5×10⁻⁹ Torr	as printed: "Base pressure (CF)"; 7.5×10⁻¹⁰ Torr
Volume flow rate Pumping speed	340 L/s oem source Source · 2026-10-03	320 L/s oem source Source · 2026-10-03	290 L/s oem source Source · 2026-10-03
Max. backing pressure				400 Pa oem source Source · 2026-10-03
Recommended backing vacuum pump				≥160 L/min oem source Source · 2026-10-03
Weight					14 (ISO-B・VG), 17 (CF) (ISO-B・VG). 17 (CF) kg oem source Source · 2026-10-20
Ultimate pressure						1×10⁻⁶ Pa oem source Source · 2026-10-20	1×10⁻⁷ Pa oem source Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

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Service parts

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