TG553

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Osaka Vacuum product page · retrieved 2026-10-03

As published	N₂; rate	N₂ (with protective screen); rate	H₂; rate	N₂	Value	as printed: "Base pressure (VG・ISO-B)"; <7.5×10⁻⁹ Torr	as printed: "Base pressure (CF)"; <7.5×10⁻¹⁰ Torr
Volume flow rate Pumping speed	550 L/s oem source Source · 2026-10-03	430 L/s oem source Source · 2026-10-03	370 L/s oem source Source · 2026-10-03
Max. throughput				1500 sccm oem source Source · 2026-10-03
Max. backing pressure					300 Pa oem source Source · 2026-10-03
Recommended backing vacuum pump					≥250 L/min oem source Source · 2026-10-03
Lubrication oil quantity					260 mL oem source Source · 2026-10-03
Weight					41 kg oem source Source · 2026-10-03
Ultimate pressure						<1×10⁻⁶ Pa oem source Source · 2026-10-20	<1×10⁻⁷ Pa oem source Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

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Documents

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Service parts

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