TG70F-20

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Osaka Vacuum product page · retrieved 2026-10-03

As published	N₂, ISO-R; rate	N₂, CF; rate	N₂ (with protective screen), ISO-R; rate	N₂ (with protective screen), CF; rate	H₂, ISO-R; rate	H₂, CF; rate	ISO-R	CF	N₂, Natural air cooling	N₂, Forced air cooling	Value	as printed: "Input Power (VA)"
Volume flow rate Pumping speed	70 L/s oem source Source · 2026-10-03	75 L/s oem source Source · 2026-10-03	65 L/s oem source Source · 2026-10-03	70 L/s oem source Source · 2026-10-03	40 L/s oem source Source · 2026-10-03	45 L/s oem source Source · 2026-10-03
Base pressure Ultimate pressure							<5×10⁻⁷ Pa oem source Source · 2026-10-03	<1×10⁻⁷ Pa oem source Source · 2026-10-03
Max. throughput									10 sccm oem source Source · 2026-10-03	20 sccm oem source Source · 2026-10-03
Max. backing pressure											1200 Pa oem source Source · 2026-10-03
Recommended backing vacuum pump											≥25 L/min oem source Source · 2026-10-03
Weight								4.6 kg oem source Source · 2026-10-03
Power consumption												240 VA oem source Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

Same family: TG70F

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Documents

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Service parts

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