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Pumping speed
90 m³/h
Weight
11 kg
Ultimate pressure
0.000001 mbar

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Osaka Vacuum product page · retrieved 2026-10-03
As publishedN₂; rateN₂ (with protective screen); rateH₂; rateN₂Valueas printed: "Base pressure"; < 7.5×10⁻⁷ Torr
Volume flow rate
Pumping speed
25 L/s
oem source
Source · 2026-10-03
23 L/s
oem source
Source · 2026-10-03
13 L/s
oem source
Source · 2026-10-03
Max. throughput *1 *2
600 sccm
oem source
Source · 2026-10-03
Max. backing pressure
1200 Pa
oem source
Source · 2026-10-03
Recommended backing vacuum pump
≥80 L/min
oem source
Source · 2026-10-03
Weight
11 kg
oem source
Source · 2026-10-03
Ultimate pressure
< 1×10⁻⁴ Pa
oem source
Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

Reviewed operating performance · 60 Hz

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    Osaka Vacuum TS50 | Vac & Air