Vacuum · Japan
Shimadzu (Turbomolecular Pumps)
Shimadzu Corporation manufactures turbomolecular pumps for semiconductor, thin-film coating and analytical applications.
Shimadzu acquired the European turbomolecular pump service company infraserv Vakuumservice GmbH.
See all 58 models with OEM data- Status
- Active brand
- Parent company
- Shimadzu Corporation
- Region
- Asia
- Verified
- 2026-10-01
- Confidence
- high
- Profile
- Not yet claimed · Are you Shimadzu (Turbomolecular Pumps)?
Primary technologies
Primary markets
semiconductor · coating · analytical instruments · research
In the catalogue
58 models with OEM dataBy technology
Ratings across the range
- Ultimate pressure
- 1e-11 – 1e-9 mbar · 58
- Pumping speed
- 252 – 19,100 m³/h · 54
- Weight
- 2.9 – 180 kg · 54
Product families
TMP-1003 · 4TMP-1103 · 4TMP-203 · 4TMP-303 · 4TMP-403 · 4TMP-803 · 4TMP-1303 · 2TMP-1503 · 2TMP-2203 · 2TMP-2404 · 2TMP-2804 · 2TMP-3304 · 2TMP-3804 · 2TMP-4304 · 2TMP-4805 · 2TMP-5305 · 2TMP-V3304LM (0) · 2TMP-X2905LMC · 2TMP-X3405LMC · 2TMP-B300 · 1TMP-B70 · 1TMP-V1704LM · 1TMP-V2304LM · 1TMP-V2804LM · 1TMP-V4404LMW · 1TMP-X1205LM · 1TMP-X1605LM · 1
Data coverage
One page per pump: HTML specification table (variants across the top; gases as sub-rows)
– Ultimate pressure is printed as an order of magnitude ("10⁻⁸ Pa order"), so it is not compared
– No product photos or documents on the model pages
Coming next
- Full model range with sourced curves
- Manuals, parts lists and service intervals
- Authorised suppliers and service providers
- Replacement and cross-reference guidance