OEM catalogue · 27 current + 0 legacy models

Ebara catalogue

Every value below is read from Ebara’s own published data, with the source page and test condition kept on each figure. Vac & Air is independent and not affiliated with Ebara.

EMT

Turbomolecular · 5 models

Model	Flow	Ultimate pressure / max vacuum	Motor
EMT1307M	4,680 m³/h	1e-10 mbar	-
EMT2400M	8,640 m³/h	1e-8 mbar	-
EMT397M	1,224 m³/h	1e-9 mbar	-
EMT427M	1,440 m³/h	1e-9 mbar	-
EMT907M	3,240 m³/h	1e-10 mbar	-

EV-M

Multi-stage Roots (Dry) · 9 models

Model	Flow	Ultimate pressure / max vacuum	Motor
EV-M102N	600 m³/h	0.005 mbar	-
EV-M1205SF	6,600 m³/h	0.005 mbar	-
EV-M202N	1,200 m³/h	0.005 mbar	-
EV-M20N	108 m³/h	0.05 mbar	-
EV-M302N	1,800 m³/h	0.005 mbar	-
EV-M502N	3,000 m³/h	0.005 mbar	-
EV-M505SF	3,000 m³/h	0.005 mbar	-
EV-M802N	4,800 m³/h	0.005 mbar	-
EV-M805SF	4,800 m³/h	0.005 mbar	-

EV-S

Multi-stage Roots (Dry) · 10 models

Model	Flow	Ultimate pressure / max vacuum	Motor
EV-S100	600 m³/h	0.005 mbar	-
EV-S100P/N	600 m³/h	0.005 mbar	-
EV-S20	100 m³/h	0.03 mbar	-
EV-S200	1,200 m³/h	0.005 mbar	-
EV-S200P/N	1,200 m³/h	0.005 mbar	-
EV-S20P/N	100 m³/h	0.05 mbar	-
EV-S30	198 m³/h	0.005 mbar	-
EV-S30P	198 m³/h	0.01 mbar	-
EV-S50	300 m³/h	0.005 mbar	-
EV-S50P/N	300 m³/h	0.005 mbar	-

EV-SA

Multi-stage Roots (Dry) · 3 models

Model	Flow	Ultimate pressure / max vacuum	Motor
EV-SA20	100 m³/h	0.03 mbar	-
EV-SA30	198 m³/h	0.02 mbar	-
EV-SA50	300 m³/h	0.005 mbar	-