Vacuum · Japan
Ebara
Ebara Corporation's Precision Machinery business manufactures dry vacuum pumps, turbomolecular pumps and exhaust abatement systems, mainly for semiconductor and flat-panel manufacturing.
See all 27 models with OEM data- Status
- Active
- Parent company
- Independent
- Region
- Asia
- Verified
- 2026-10-01
- Confidence
- high
- Profile
- Not yet claimed · Are you Ebara?
Primary technologies
Known product families
Primary markets
semiconductor · electronics · solar · coating
In the catalogue
27 models with OEM dataBy technology
Ratings across the range
- Pumping speed
- 100 – 8,640 m³/h · 27
- Ultimate pressure
- 1e-10 – 0.05 mbar · 27
- Weight
- 16 – 870 kg · 27
Product families
Data coverage
series pages via Firecrawl (EV-M, EV-S, EV-SA spec tables) and the EMT turbomolecular data sheet from EBARA Precision Machinery Europe (pumping speed)
– EV-X, EV-PA, EV-A10, EST, ESA, ESR: neither EBARA site nor their data sheets name the mechanism; not read until confirmed
– EMT ultimate pressures printed as limits and weights as ranges; not read
– Bracketed second figures (e.g. 230 (200)) left out, meaning not stated
Coming next
- Full model range with sourced curves
- Manuals, parts lists and service intervals
- Authorised suppliers and service providers
- Replacement and cross-reference guidance