TMP-1503LM

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

As published	Value	N2	He	H2	as printed: "Ultimate pressure (after baking) (Note 1)"; order of magnitude
Maximum allowable Argon gas flow rate	500 mL/min mL/min oem source Source · 2026-10-03
Maximum allowable inlet pressure (N2 continuous exhaust)	133 Pa Pa oem source Source · 2026-10-03
Maximum Outlet Pressure During Continuous Operation	270 Pa Pa oem source Source · 2026-10-03
Pumping speed		1500 L/s L/s oem source Source · 2026-10-03	1200 L/s L/s oem source Source · 2026-10-03	800 L/s L/s oem source Source · 2026-10-03
Rated speed Speed	30300 rpm rpm oem source Source · 2026-10-03
Mass Weight	42 kg kg oem source Source · 2026-10-03
Ultimate pressure					10 -8 Pa oem source Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

Same family: TMP-1503LMC

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