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Weight
6 kg
Max. pressure
0.013 bar
Ultimate pressure
1e-10 mbar

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Shimadzu (Turbomolecular Pumps) product page · retrieved 2026-10-03
As publishedValueMaximum poweras printed: "Mass ISO (Natural Air Cooling)"as printed: "Maximum Outlet Pressure During Continuous Operation (Note 5) N2 (Water Cooling)"as printed: "Mass VG (Natural Air Cooling)"as printed: "Mass ISO (Forced Cooling)"as printed: "Mass ICF (Natural Air Cooling)"as printed: "Maximum Outlet Pressure During Continuous Operation (Note 5) N2 (Natural Air Cooling)"as printed: "Maximum Outlet Pressure During Continuous Operation (Note 5) N2 (Forced Cooling)"as printed: "Ultimate pressure (Note 3) after baking"; order of magnitudeas printed: "Input electric power | Maximum power"; one cell shared by several modelsas printed: "Mass VG (Water Cooling)"as printed: "Ultimate pressure (Note 3) before baking"; order of magnitudeas printed: "Mass ICF (Forced Cooling)"as printed: "Mass ICF (Water Cooling)"as printed: "Mass VG (Forced Cooling)"as printed: "Mass ISO (Water Cooling)"
Rated speed
Speed
60000 rpm rpm
oem source
Source · 2026-10-03
Input electric power
180 W W
oem source
Source · 2026-10-03
Weight
6.0 kg
oem source
Source · 2026-10-20
6.3 kg
oem source
Source · 2026-10-20
6.3 kg
oem source
Source · 2026-10-20
9.4 kg
oem source
Source · 2026-10-20
7.0 kg
oem source
Source · 2026-10-20
9.7 kg
oem source
Source · 2026-10-20
10.1 kg
oem source
Source · 2026-10-20
6.6 kg
oem source
Source · 2026-10-20
6.7 kg
oem source
Source · 2026-10-20
Max. pressure
1300 Pa
oem source
Source · 2026-10-20
100 Pa
Needs review · excluded from comparison
Source · 2026-10-20
1000 Pa
oem source
Source · 2026-10-20
930 Pa
Needs review · excluded from comparison
Source · 2026-10-20
Ultimate pressure
10 -8 Pa
oem source
Source · 2026-10-20
10 -6 Pa
oem source
Source · 2026-10-20
Power consumption
180 WS
oem source
Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

S stated once for the whole series by the manufacturer

Reviewed operating performance · 60 Hz

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