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Pumping speed
7,560 m³/h
Weight
56 kg
Ultimate pressure
1e-9 mbar

Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.

Technical data

Source: Shimadzu (Turbomolecular Pumps) product page · retrieved 2026-10-03
As publishedValueN2ArMaximum poweras printed: "Ultimate pressure (after baking)"; order of magnitude
Maximum allowable Argon gas flow rate
600 mL/min mL/min
oem source
Source · 2026-10-03
Maximum allowable inlet pressure (N2 continuous exhaust)
4.5 Pa Pa
oem source
Source · 2026-10-03
Maximum allowable outlet pressure (N2 continuous exhaust)
200 Pa Pa
oem source
Source · 2026-10-03
Pumping speed
2100 L/s L/s
oem source
Source · 2026-10-03
2000 L/s L/s
oem source
Source · 2026-10-03
Rated speed
Speed
33700 rpm rpm
oem source
Source · 2026-10-03
Recommended flow rate of purge gas
30 mL/min mL/min
oem source
Source · 2026-10-03
Input electric power
1.2 kVA kVA
oem source
Source · 2026-10-03
Mass
Weight
56 kg kg
oem source
Source · 2026-10-03
Ultimate pressure
10 -7 Pa
oem source
Source · 2026-10-20

Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.

Reviewed operating performance · 60 Hz

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