Vacuum · Japan
Kashiyama
Kashiyama Industries manufactures dry vacuum pumps, including screw and multi-stage roots types, primarily for semiconductor and flat-panel display production.
See all 32 models with OEM data- Status
- Active
- Parent company
- Independent
- Region
- Asia
- Verified
- 2026-10-01
- Confidence
- high
- Profile
- Not yet claimed · Are you Kashiyama?
Primary technologies
In the catalogue
32 models with OEM dataBy technology
Ratings across the range
- Pumping speed
- 6.6 – 1,200 m³/h · 32
- Weight
- 17 – 345 kg · 26
- Ultimate pressure
- 0.003 – 0.05 mbar · 21
- Motor power
- 0.4 – 15 kW · 11
- Noise level
- 55 – 72 dB(A) · 7
Product families
Data coverage
English series pages: one table per series with the models across the top (pumping speed, ultimate pressure, power, moisture tolerance, noise, mass; cells spanning several models kept as series figures); mechanism from the OEM's own words, mostly in image alt text (NeoDry E "multi-stage root-rotors", MU-PE/HE and MU-XE "Roots dry pump", SDE "screw type rotor"); LEH/LEM water-sealed (水封式) liquid ring table read from the Japanese page with translated labels; each series page's pumping speed curve image read by Claude vision, its points plotted for models whose curve top matches the printed max. pumping speed within 15 %
– SD, SDL, MU and NeoDry G: no page, image text, Japanese page or catalogue PDF states their mechanism; not filed
– SDE X/TX columns printing two powers ("1.5/3.0") and dimensions are not read
– LEH/LEM ultimate pressure printed with a superscript exponent ("7.3×10³"); not read
– Brochure PDFs carry no text layer beyond the S-P curve axes
– NeoDry15E's curve is labelled "NeoDr15E" in the legend; not matched
Coming next
- Full model range with sourced curves
- Manuals, parts lists and service intervals
- Authorised suppliers and service providers
- Replacement and cross-reference guidance