Pfeiffer Vacuum+Fab Solutions · ATH 2804/3204 M/MT
ATH 3204 M
*Photo shows the ATH series, not necessarily this exact model. Image: Pfeiffer Vacuum+Fab Solutions
- Pumping speed
- 11,000 m³/h
Headline ratings converted to common units for comparison; the table below shows each figure exactly as published.
Technical data
Source: Pfeiffer Vacuum+Fab Solutions product page · retrieved 2026-10-04| As published | ISO; N₂ | ISO |
|---|---|---|
| Pumping speed N₂ Pumping speed | ||
| Rotational speed Speed |
Original extracted values are shown with their source and review status. Multiple values under the same condition remain separate for review.
Same family: ATH 2804 M, ATH 2804 MT, ATH 3204 MT
Reviewed operating performance · 60 Hz
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Documents
- Product Leaflet ATH 2804_3204 M_MT_Global ENdatasheet · 4 pp
- ATH 3204_EN_enmanual · 78 pp
- Pumping speed curveISO
- Pumping speed curveISO
- Dimensional drawingISO
Documents open on the manufacturer’s site.
Not on file yet
- MissingPfeiffer Vacuum+Fab Solutions's parts drawing (exploded view) for the ATH 3204 M
- MissingA parts list for the ATH 3204 M
We don’t have these from Pfeiffer Vacuum+Fab Solutions yet. A specialist can still help you find the right part for the ATH 3204 M.