OEM catalogue · 153 current + 0 legacy models
Pfeiffer Vacuum+Fab Solutions catalogue
Every value below is read from Pfeiffer Vacuum+Fab Solutions’s own published data, with the source page and test condition kept on each figure. Vac & Air is independent and not affiliated with Pfeiffer Vacuum+Fab Solutions.
ATH
Turbomolecular · 12 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| ATH 1600 MT | - | - | - |
| ATH 1603 M | - | - | - |
| ATH 2300 MT | - | - | - |
| ATH 2303 M | - | - | - |
| ATH 2804 M | 8,460 m³/h | - | - |
| ATH 2804 MT | 8,460 m³/h | - | - |
| ATH 3204 M | 10,980 m³/h | - | - |
| ATH 3204 MT | 10,980 m³/h | - | - |
| ATH 4506 M | 16,200 m³/h | - | - |
| ATH 4506 MT | 16,200 m³/h | - | - |
| ATH 500 M | - | - | - |
| ATH 500 MT | 1,980 m³/h | - | - |
ATP
Turbomolecular · 2 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| ATP 1603 M | 4,500 m³/h | - | - |
| ATP 2300 M | - | - | - |
COMBI
Central Vacuum Systems · 57 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| COMBI RD 1002 | - | 0.0005 mbar | - |
| COMBI RD 1604 | - | 0.0009 mbar | - |
| COMBI RD 2054 | - | 0.0009 mbar | - |
| COMBI RH 1102 | - | 0.007 mbar | - |
| COMBI RH 1152 | - | 0.004 mbar | - |
| COMBI RH 1202 L | - | 0.007 mbar | - |
| COMBI RH 1252 | - | 0.001 mbar | - |
| COMBI RH 1252 L | - | 0.007 mbar | - |
| COMBI RH 1304 | - | 0.007 mbar | - |
| COMBI RH 1604 | - | 0.007 mbar | - |
| COMBI RH 1704 | - | 0.007 mbar | - |
| COMBI RH 1754 L | - | 0.01 mbar | - |
| COMBI RH 1854 | - | 0.002 mbar | - |
| COMBI RH 1854 L | - | 0.01 mbar | - |
| COMBI RH 1904 L | - | 0.01 mbar | - |
| COMBI RH 2154 | - | 0.007 mbar | - |
| COMBI RH 2204 L | - | 0.01 mbar | - |
| COMBI RH 2354 | - | 0.002 mbar | - |
| COMBI RH 2404 L | - | 0.01 mbar | - |
| COMBI RH 2504 L | - | 0.01 mbar | - |
| COMBI RH 3304 | - | 0.007 mbar | - |
| COMBI RH 3354 L | - | 0.01 mbar | - |
| COMBI RH 3654 | - | 0.002 mbar | - |
| COMBI RH 3704 L | - | 0.01 mbar | - |
| COMBI RH 3804 L | - | 0.01 mbar | - |
| COMBI RH 4254 L | - | 0.01 mbar | - |
| COMBI RH 4854 | - | 0.002 mbar | - |
| COMBI RH 4904 L | - | 0.01 mbar | - |
| COMBI RH 5104 L | - | 0.01 mbar | - |
| COMBI RH 902 | - | 0.004 mbar | - |
| COMBI RU 1002 | - | 0.007 mbar | - |
| COMBI RU 1052 | - | 0.007 mbar | - |
| COMBI RU 1102 | - | 0.005 mbar | - |
| COMBI RU 1152 | - | 0.007 mbar | - |
| COMBI RU 1454 | - | 0.01 mbar | - |
| COMBI RU 1604 | - | 0.01 mbar | - |
| COMBI RU 1654 | - | 0.01 mbar | - |
| COMBI RU 1754 | - | 0.01 mbar | - |
| COMBI RU 2004 | - | 0.01 mbar | - |
| COMBI RU 2204 | - | 0.01 mbar | - |
| COMBI RU 2304 | - | 0.01 mbar | - |
| COMBI RU 2954 | - | 0.01 mbar | - |
| COMBI RU 3404 | - | 0.005 mbar | - |
| COMBI RU 3554 | - | 0.01 mbar | - |
| COMBI RU 4704 | - | 0.01 mbar | - |
| COMBI WS 0245 WV2D | 284 m³/h | 0.0016 mbar | - |
| COMBI WS 0440 WV2D | 554 m³/h | 0.0012 mbar | - |
| COMBI WS 0900 WV2D | 1,014 m³/h | 0.0008 mbar | - |
| COMBI WVD 0220 | 247 m³/h | 0.0015 mbar | - |
| COMBI WVD 0235 | 271 m³/h | 0.0016 mbar | - |
| COMBI WVD 0245 | 284 m³/h | 0.0017 mbar | - |
| COMBI WVD 0400 | 512 m³/h | 0.0012 mbar | - |
| COMBI WVD 0440 | 551 m³/h | 0.0013 mbar | - |
| COMBI WVD 0470 | 576 m³/h | 0.0013 mbar | - |
| COMBI WVD 0900 | 998 m³/h | 0.0009 mbar | - |
| COMBI WVD 0950 | 1,105 m³/h | 0.0009 mbar | - |
| COMBI WVD 1800 | 2,006 m³/h | 0.0007 mbar | - |
DuoVane
Oil-Lubricated Rotary Vane · 12 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| DuoVane 12 | 12 m³/h | 0.003 mbar | 0.55 kW |
| DuoVane 135 | 135 m³/h | 0.002 mbar | 4.5 kW |
| DuoVane 1.6 | 1.5 m³/h | 0.003 mbar | 0.09 kW |
| DuoVane 18 | 17 m³/h | 0.003 mbar | 0.66 kW |
| DuoVane 22 | 23 m³/h | 0.003 mbar | 0.66 kW |
| DuoVane 3 | 2.9 m³/h | 0.003 mbar | 0.3 kW |
| DuoVane 30 | 29 m³/h | 0.0067 mbar | 1.5 kW |
| DuoVane 300 | 300 m³/h | 0.003 mbar | 9 kW |
| DuoVane 36 | 36 m³/h | 0.002 mbar | 1.3 kW |
| DuoVane 6 | 6.5 m³/h | 0.003 mbar | 0.55 kW |
| DuoVane 70 | 70 m³/h | 0.002 mbar | 1.8 kW |
| DuoVane 95 | 95 m³/h | 0.0067 mbar | 3.7 kW |
HiLobe
Roots / Booster · 17 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| HiLobe 1002 | - | 21 hPa hPa | 2 kW |
| HiLobe 1004 | - | 52 hPa hPa | 2 kW |
| HiLobe 11003 | - | 20 hPa hPa | 12 kW |
| HiLobe 11004 | - | 20 hPa hPa | 12 kW |
| HiLobe 1302 | - | 13 hPa hPa | 2.5 kW |
| HiLobe 1304 | - | 35 hPa hPa | 2.5 kW |
| HiLobe 14003 | - | 10 hPa hPa | 15 kW |
| HiLobe 14004 | - | 10 hPa hPa | 15 kW |
| HiLobe 2104 | - | 12 hPa hPa | 3.5 kW |
| HiLobe 2703 | - | 54 hPa hPa | 3.5 kW |
| HiLobe 2704 | - | 35 hPa hPa | 3.5 kW |
| HiLobe 4503 | - | 36 hPa hPa | 5.5 kW |
| HiLobe 4504 | - | 17 hPa hPa | 5.5 kW |
| HiLobe 6203 | - | 21 hPa hPa | 7.5 kW |
| HiLobe 6204 | - | 10 hPa hPa | 7.5 kW |
| HiLobe 8103 | - | 25 hPa hPa | 9 kW |
| HiLobe 8104 | - | 25 hPa hPa | 9 kW |
HiPace
Turbomolecular · 28 modelsHiScroll
Scroll · 4 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| HiScroll 12 | 12 m³/h | 0.006 mbar | - |
| HiScroll 18 | 18 m³/h | 0.006 mbar | - |
| HiScroll 46 | 43 m³/h | 0.007 mbar | - |
| HiScroll 6 | 6.1 m³/h | 0.015 mbar | - |
MVP
Diaphragm · 17 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| MVP 003-2 DC | 0.25 m³/h | 7 mbar | - |
| MVP 003-2 DC Vario | 0.25 m³/h | 7 mbar | - |
| MVP 010-3 DC Neo | 0.6 m³/h | 1 mbar | - |
| MVP 010-3 DC Neo - Cleanroom | 0.6 m³/h | 1 mbar | - |
| MVP 015-2 AC | - | 3.5 mbar | - |
| MVP 015-2 DC Neo | 1 m³/h | 3.5 mbar | - |
| MVP 015-4 AC | - | 0.5 mbar | - |
| MVP 015-4 DC Neo | 0.8 m³/h | 0.5 mbar | - |
| MVP 020-3 AC | - | 2 mbar | - |
| MVP 020-3 AC - Cleanroom | - | 2 mbar | - |
| MVP 030-3 C DC | 1.8 m³/h | 3 mbar | - |
| MVP 030-3 DC | 1.8 m³/h | 2 mbar | - |
| MVP 030-3 DC - Cleanroom | 1.8 m³/h | 2 mbar | - |
| MVP 040-2 AC | - | 4 mbar | - |
| MVP 070-3 AC | - | 1 mbar | - |
| MVP 070-3 AC - Cleanroom | - | 1 mbar | - |
| MVP 070-3 C AC | - | 1.5 mbar | - |
SmartVane
Oil-Lubricated Rotary Vane · 2 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| SmartVane 55 | - | 0.2 mbar | - |
| SmartVane 70 | - | 0.2 mbar | - |
SplitFlow
Turbomolecular · 2 models| Model | Flow | Ultimate pressure / max vacuum | Motor |
|---|---|---|---|
| SplitFlow 350 | - | - | - |
| SplitFlow 80 Neo | - | - | - |