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OEM catalogue · 153 current + 0 legacy models

Pfeiffer Vacuum+Fab Solutions catalogue

Every value below is read from Pfeiffer Vacuum+Fab Solutions’s own published data, with the source page and test condition kept on each figure. Vac & Air is independent and not affiliated with Pfeiffer Vacuum+Fab Solutions.

ATH

Turbomolecular · 12 models
ModelFlowUltimate pressure / max vacuumMotor
ATH 1600 MT---
ATH 1603 M---
ATH 2300 MT---
ATH 2303 M---
ATH 2804 M8,460 m³/h--
ATH 2804 MT8,460 m³/h--
ATH 3204 M10,980 m³/h--
ATH 3204 MT10,980 m³/h--
ATH 4506 M16,200 m³/h--
ATH 4506 MT16,200 m³/h--
ATH 500 M---
ATH 500 MT1,980 m³/h--

ATP

Turbomolecular · 2 models
ModelFlowUltimate pressure / max vacuumMotor
ATP 1603 M4,500 m³/h--
ATP 2300 M---

COMBI

Central Vacuum Systems · 57 models
ModelFlowUltimate pressure / max vacuumMotor
COMBI RD 1002-0.0005 mbar-
COMBI RD 1604-0.0009 mbar-
COMBI RD 2054-0.0009 mbar-
COMBI RH 1102-0.007 mbar-
COMBI RH 1152-0.004 mbar-
COMBI RH 1202 L-0.007 mbar-
COMBI RH 1252-0.001 mbar-
COMBI RH 1252 L-0.007 mbar-
COMBI RH 1304-0.007 mbar-
COMBI RH 1604-0.007 mbar-
COMBI RH 1704-0.007 mbar-
COMBI RH 1754 L-0.01 mbar-
COMBI RH 1854-0.002 mbar-
COMBI RH 1854 L-0.01 mbar-
COMBI RH 1904 L-0.01 mbar-
COMBI RH 2154-0.007 mbar-
COMBI RH 2204 L-0.01 mbar-
COMBI RH 2354-0.002 mbar-
COMBI RH 2404 L-0.01 mbar-
COMBI RH 2504 L-0.01 mbar-
COMBI RH 3304-0.007 mbar-
COMBI RH 3354 L-0.01 mbar-
COMBI RH 3654-0.002 mbar-
COMBI RH 3704 L-0.01 mbar-
COMBI RH 3804 L-0.01 mbar-
COMBI RH 4254 L-0.01 mbar-
COMBI RH 4854-0.002 mbar-
COMBI RH 4904 L-0.01 mbar-
COMBI RH 5104 L-0.01 mbar-
COMBI RH 902-0.004 mbar-
COMBI RU 1002-0.007 mbar-
COMBI RU 1052-0.007 mbar-
COMBI RU 1102-0.005 mbar-
COMBI RU 1152-0.007 mbar-
COMBI RU 1454-0.01 mbar-
COMBI RU 1604-0.01 mbar-
COMBI RU 1654-0.01 mbar-
COMBI RU 1754-0.01 mbar-
COMBI RU 2004-0.01 mbar-
COMBI RU 2204-0.01 mbar-
COMBI RU 2304-0.01 mbar-
COMBI RU 2954-0.01 mbar-
COMBI RU 3404-0.005 mbar-
COMBI RU 3554-0.01 mbar-
COMBI RU 4704-0.01 mbar-
COMBI WS 0245 WV2D284 m³/h0.0016 mbar-
COMBI WS 0440 WV2D554 m³/h0.0012 mbar-
COMBI WS 0900 WV2D1,014 m³/h0.0008 mbar-
COMBI WVD 0220247 m³/h0.0015 mbar-
COMBI WVD 0235271 m³/h0.0016 mbar-
COMBI WVD 0245284 m³/h0.0017 mbar-
COMBI WVD 0400512 m³/h0.0012 mbar-
COMBI WVD 0440551 m³/h0.0013 mbar-
COMBI WVD 0470576 m³/h0.0013 mbar-
COMBI WVD 0900998 m³/h0.0009 mbar-
COMBI WVD 09501,105 m³/h0.0009 mbar-
COMBI WVD 18002,006 m³/h0.0007 mbar-

DuoVane

Oil-Lubricated Rotary Vane · 12 models
ModelFlowUltimate pressure / max vacuumMotor
DuoVane 1212 m³/h0.003 mbar0.55 kW
DuoVane 135135 m³/h0.002 mbar4.5 kW
DuoVane 1.61.5 m³/h0.003 mbar0.09 kW
DuoVane 1817 m³/h0.003 mbar0.66 kW
DuoVane 2223 m³/h0.003 mbar0.66 kW
DuoVane 32.9 m³/h0.003 mbar0.3 kW
DuoVane 3029 m³/h0.0067 mbar1.5 kW
DuoVane 300300 m³/h0.003 mbar9 kW
DuoVane 3636 m³/h0.002 mbar1.3 kW
DuoVane 66.5 m³/h0.003 mbar0.55 kW
DuoVane 7070 m³/h0.002 mbar1.8 kW
DuoVane 9595 m³/h0.0067 mbar3.7 kW

HiLobe

Roots / Booster · 17 models
ModelFlowUltimate pressure / max vacuumMotor
HiLobe 1002-21 hPa hPa2 kW
HiLobe 1004-52 hPa hPa2 kW
HiLobe 11003-20 hPa hPa12 kW
HiLobe 11004-20 hPa hPa12 kW
HiLobe 1302-13 hPa hPa2.5 kW
HiLobe 1304-35 hPa hPa2.5 kW
HiLobe 14003-10 hPa hPa15 kW
HiLobe 14004-10 hPa hPa15 kW
HiLobe 2104-12 hPa hPa3.5 kW
HiLobe 2703-54 hPa hPa3.5 kW
HiLobe 2704-35 hPa hPa3.5 kW
HiLobe 4503-36 hPa hPa5.5 kW
HiLobe 4504-17 hPa hPa5.5 kW
HiLobe 6203-21 hPa hPa7.5 kW
HiLobe 6204-10 hPa hPa7.5 kW
HiLobe 8103-25 hPa hPa9 kW
HiLobe 8104-25 hPa hPa9 kW

HiPace

Turbomolecular · 28 models

HiScroll

Scroll · 4 models
ModelFlowUltimate pressure / max vacuumMotor
HiScroll 1212 m³/h0.006 mbar-
HiScroll 1818 m³/h0.006 mbar-
HiScroll 4643 m³/h0.007 mbar-
HiScroll 66.1 m³/h0.015 mbar-

MVP

Diaphragm · 17 models
ModelFlowUltimate pressure / max vacuumMotor
MVP 003-2 DC0.25 m³/h7 mbar-
MVP 003-2 DC Vario0.25 m³/h7 mbar-
MVP 010-3 DC Neo0.6 m³/h1 mbar-
MVP 010-3 DC Neo - Cleanroom0.6 m³/h1 mbar-
MVP 015-2 AC-3.5 mbar-
MVP 015-2 DC Neo1 m³/h3.5 mbar-
MVP 015-4 AC-0.5 mbar-
MVP 015-4 DC Neo0.8 m³/h0.5 mbar-
MVP 020-3 AC-2 mbar-
MVP 020-3 AC - Cleanroom-2 mbar-
MVP 030-3 C DC1.8 m³/h3 mbar-
MVP 030-3 DC1.8 m³/h2 mbar-
MVP 030-3 DC - Cleanroom1.8 m³/h2 mbar-
MVP 040-2 AC-4 mbar-
MVP 070-3 AC-1 mbar-
MVP 070-3 AC - Cleanroom-1 mbar-
MVP 070-3 C AC-1.5 mbar-

SmartVane

Oil-Lubricated Rotary Vane · 2 models
ModelFlowUltimate pressure / max vacuumMotor
SmartVane 55-0.2 mbar-
SmartVane 70-0.2 mbar-

SplitFlow

Turbomolecular · 2 models
ModelFlowUltimate pressure / max vacuumMotor
SplitFlow 350---
SplitFlow 80 Neo---