Vacuum · Japan
ULVAC
ULVAC is a Japanese vacuum equipment group that makes vacuum pumps, including dry screw, scroll, diaphragm and turbomolecular pumps, alongside deposition and process equipment.
See all 45 models with OEM data- Status
- Active
- Parent company
- Independent
- Region
- Asia
- Verified
- 2026-10-01
- Confidence
- high
- Profile
- Not yet claimed · Are you ULVAC?
Primary technologies
Known product families
Primary markets
semiconductor · electronics · coating · research · analytical instruments
In the catalogue
45 models with OEM dataBy technology
Ratings across the range
- Weight
- 1.75 – 280 kg · 43
- Pumping speed
- 1.38 – 1,800 m³/h · 36
- Motor power
- 0.01 – 11 kW · 33
- Ultimate pressure
- 0.0067 – 100 mbar · 23
- Max. vacuum
- 33.3 – 80 mbar · 4
Product families
Data coverage
Series data sheet PDFs (one model per column, 50/60 Hz sub-columns); a row is read only when it has one value per model column; series photo from each series page
– Dry pumps LS, CR and LR/HR/UR: the sheets don't state the mechanism, so they are not filed
– DOP rocking-piston pumps: no matching technology
– Exponents printed without superscript ("5.33 × 103") are left out
– PVD, VS650A/750A, VD, Gv200, MBS and PRC-A/PMB-C sheets use other layouts
Coming next
- Full model range with sourced curves
- Manuals, parts lists and service intervals
- Authorised suppliers and service providers
- Replacement and cross-reference guidance