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Vac & Air/Industries
Stainless gas manifold lines on a clean-room wall

Semiconductor

Dry vacuum from load-lock to process chamber, and ultra-clean dry air throughout the fab.

Applications

Process VacuumProcess gas compatibility, deep vacuumLeak TestingFast pump-down, low ultimateInstrument AirLow dew point, oil-free or filtered

Technologies

Dryers · 2,010 modelsOil-Free Screw · 489 modelsRoots / Booster · 179 modelsDry Screw · 111 modelsScroll · 46 models

Manufacturers with models in these technologies

Hertz Kompressoren · 236Ingersoll Rand · 222Sullair · 198Friulair · 190BOGE · 166nano-purification solutions · 147Atlas Copco · 144Pneumatech · 144Hankison · 130Pneumatic Products · 121Zeks · 106Deltech · 97BEKO Technologies · 89Busch · 73ALMiG · 67DENAIR · 61DV Systems · 53Van Air Systems · 43

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